Dynamic Characterisation of MEMS

Overview

Welcome to our specialized research endeavors at the forefront of MEMS (Micro-Electro-Mechanical Systems) dynamics and cutting-edge measurement techniques. Our lab is dedicated to advancing precision measurement for micro-scale sensors, with a particular emphasis on MEMS devices. At our disposal are state-of-the-art facilities that empower our research and enable us to push the boundaries of MEMS technology.

We delve into the dynamic world of microscale sensors and actuators, MEMS resonators, and energy harvesters, unraveling their intricate behaviors and propelling the field towards new heights. Our specialized expertise lies in the precise measurement and analysis of these technologies, where we employ state-of-the-art tools and methodologies to uncover critical insights.

In the realm of microscale sensors and actuators, we focus on optimizing their sensitivity, response times, and integration with larger systems, paving the way for advancements in fields such as healthcare, automation, and aerospace. Additionally, our pioneering work in MEMS resonators leads to the development of highly stable and precise frequency references, essential for applications in communication systems and navigation. 

Our Facilities

Key Enabling Technologies:

• PSV-500 Scanning Vibrometer with Close-Up Unit Lenses: Our PSV-500 Scanning Vibrometer, equipped with close-up unit lenses, allows us to perform high-resolution, non-contact measurements on MEMS devices. This advanced system captures detailed vibration data, providing crucial insights into the dynamic behavior of these intricate structures.
• High-Quality Vacuum Chamber with Gas Injection Option: Within our lab, we house a top-tier vacuum chamber with the capability for gas injection. This facility creates an environment conducive to the study of MEMS devices under controlled atmospheric conditions, ensuring precise and reliable measurements.
• Variety of Piezo Actuators with Vacuum Capability: We maintain a diverse collection of piezo actuators, each equipped with vacuum capabilities. This array of actuators allows us to apply controlled forces to MEMS devices, simulating real-world conditions and facilitating in-depth analyses.
• Piezo Controller for Driving and Controlling Actuators: To drive and precisely control piezo actuators, we employ a specialized controller capable of providing voltage ranging from -20V to 150V. This crucial component ensures that our experiments are conducted with the utmost accuracy and control.

Specialist Area Leads

Events